发明名称 LASER SURFACE TREATMENT DEVICE AND METHOD
摘要 In a laser surface treatement method, at least two generally similar surfaces of a given depth are provided, on each of wich a treatment laser beam is to be applied in one or several steps, with properties selected so as to change the physical state of each surface. At least one ellipsometry measurement is made at least before one of the applications of the beam on the second surface, in at least one region of the first surface, so as to obtain a physico-chemical characterisation of the said first surface, the laser beam application and the ellipsometry measurement being conducted in generally similar working conditions, so that the change of the physical state of each surface produced by the laser can be controlled in real time, in situ, rapidly and non destructively, on the basis of said characteristics.
申请公布号 CA2225422(A1) 申请公布日期 1997.02.27
申请号 CA19962225422 申请日期 1996.07.03
申请人 SOCIETE DE PRODUCTION ET DE RECHERCHES APPLIQUEES 发明人 STEHLE, MARC;BOHER, PIERRE
分类号 H01L21/20;H01L21/268;H01L21/66;(IPC1-7):B23K26/02;G02F1/133;G09G3/36 主分类号 H01L21/20
代理机构 代理人
主权项
地址