| 摘要 |
FIELD: thin-film technology used in microelectronics, optics, acceleration equipment, mechanical engineering, aviation and space technology. SUBSTANCE: magnetron comprises discharge unit placed into vacuum chamber and power supply systems. Discharge unit has anode (sputtered substrate) cooled cathode (sputtered target) and magnetic system of periodically repeated elements composed of permanent magnets assembled in certain sequence with the help of washers, concentrators of magnetic field and pole pieces on end of each element. As compared with similar magnetrons proposed one has higher sputtering speed which enables to improve general characteristics of produced films and to expand technological capabilities of magnetron. Preliminary tests of magnetron showed that its efficiency grows more than 6 time as compared with prototype. EFFECT: increased efficiency. |
