| 摘要 |
A buffered probing device includes a cantilever-shaped probe (1) having a micro-needle (4) at its tip, and an electric circuit (7) that applies electrical signals between the micro-needle and a probe target (3) to which an electrical stimulus is applied. In one embodiment of the invention, the probe includes a suspension member (9) having a spring constant per unit length that is less than that of a probe body. The micro-needle is formed on the suspension member. In another embodiment of the invention, the electric circuit (6) applies oscillations at a specific frequency to the probe, such that the micro-needle is always or intermittently in contact with the surface of the probe target (3). As a result, wear of the needle is greatly reduced. <IMAGE> |
