| 摘要 |
<p>PURPOSE:To get a turbine vacuum pump which keeps high performance of a regenerative pump by arranging a regenerative pump which consists of blades arranged on axially projecting parts of a rotor and ventilation flues arranged o a periphery of a stator in a face-to-face relation with the blades. CONSTITUTION:A regenerative pump is made up of forward circular blades 5 of a stator 6 of the regenerative pump, formed on axially projecting projecting parts of a rotor 1 of the regenerative pump and ventilation flues 7 formed on parts which are axially opposed to the circular blades 5. Since it is possible to provide space to be connected to the ventilation flues 7 in the outside and the inside of the blades 5, it is possible to make an efficient radial flow through the blades from the inside to the outside and to fully utilize centrifugal force. In addition, it is possible to give energy to molecules of gas by changing direc tion of the flow, as shown with arrows, by means of the forward circular blades 5. Consequently, this type of a regenerative pump has high compression ratio and high performance. This brings about high performance of the turbine vac uum pump as a whole also.</p> |
