发明名称 Dynamic RAM trench capacitor device with contact strap
摘要 A FEC-DRAM of 3 elements/2 bits type having a stack capacitor of increased capacitance to ensure integration with an increased density. The stack capacitor is formed as embedded in a trench, and local wiring is provided to form an electric contact on an element isolation region. When required, the stack capacitor is made to extend onto a word line region. The stack capacitor is given an increased surface area and a greater capacitance, consequently reducing the area occupied and making it possible to provide DRAMs with a higher packing density.
申请公布号 US5606189(A) 申请公布日期 1997.02.25
申请号 US19930111967 申请日期 1993.08.26
申请人 SHARP KABUSHIKI KAISHA 发明人 ADAN, ALBERTO O.
分类号 H01L21/8242;H01L27/108;(IPC1-7):H01L29/78 主分类号 H01L21/8242
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