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发明名称
MICROFABRICATED PARTICLE FILTER
摘要
申请公布号
EP0749352(A4)
申请公布日期
1997.02.19
申请号
EP19950912743
申请日期
1995.03.07
申请人
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人
KELLER, CHRISTOPHER G.;FERRARI, MAURO
分类号
B01D39/16;B01D39/20;B01D67/00;B01D69/02;B01D69/12;B01D71/02;B01D71/70;B81B1/00;C23C16/01;G03F7/00;(IPC1-7):B01D69/00
主分类号
B01D39/16
代理机构
代理人
主权项
地址
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