发明名称 SEALED TYPE ULTRA-PRECISION FINE ADJUSTMENT
摘要 PROBLEM TO BE SOLVED: To obtain a large generation force with a single device, completely breaking steam in air, and enforce a device against tensile force and bending force by arranging a plurality of piezoelectric elements in parallel, providing support plates at both edges of the piezoelectric elements, and sealing them into a metal container with a expansion structure. SOLUTION: A plurality of piezoelectric elements 1 are arranged in a device and a plurality of ball plungers 8 provided at a second support plate 11 are pushed in from the lower part of the second support plate 11, thus pushing in a support part 21 of a lower plate 7 of the piezoelectric elements 1 with a hemisphere attached to the ball plungers 8 and making constant the scattering in the height of the piezoelectric elements 1. As a result, the amount of displacement of a plurality of piezoelectric elements 1 can be made constant and the tip of a plurality of piezoelectric elements 1 push an output member 2 together so that the output member 2 pushes a table in parallel with an output shaft and bending force cannot be applied easily, thus obtaining several multiples of generation force as compared with the case of a single piezoelectric element and preventing the device from being easily damaged.
申请公布号 JPH0951686(A) 申请公布日期 1997.02.18
申请号 JP19950221081 申请日期 1995.08.07
申请人 CHICHIBU ONODA CEMENT CORP 发明人 ONO SHOICHI;MUNEKATA MUTSUO;MATSUNO SUSUMU
分类号 G01B21/00;B23Q5/28;G05D3/00;H01L21/027;H01L21/301;H01L21/68;H01L41/09;H02N2/00 主分类号 G01B21/00
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