Field emission scanning electron microsope and method of controlling beam aperture angle,申请号EP19900105928-传众专利搜索

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发明名称	Field emission scanning electron microsope and method of controlling beam aperture angle
摘要
申请公布号	EP0390118(B1)	申请公布日期	1997.02.12
申请号	EP19900105928	申请日期	1990.03.28
申请人	HITACHI, LTD.	发明人	SATO, MITSUGU
分类号	G01Q30/02;H01J37/06;G01Q30/04;G01Q30/16;H01J37/09;H01J37/141;H01J37/28;(IPC1-7):H01J37/28;H01J37/04	主分类号	G01Q30/02
代理机构		代理人
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