发明名称 |
Method of making stacked electrical device having regions of electrical isolation and electrical connection on a given stack level |
摘要 |
An improved method for isolating electrical conductors which are positioned over each other is disclosed. These conductors would normally contact each other because of the somewhat imprecise patterning and etching steps used to fabricate a multitude of conductive elements, e.g., in a very dense semiconductor structure. The method involves forming a recess in the upper surface of the lower conductor, and then at least partially filling the recess with an oxide-type material. This method is particularly valuable in the construction of stacked capacitor cells. Cells prepared using this technique also form part of this invention.
|
申请公布号 |
US5602051(A) |
申请公布日期 |
1997.02.11 |
申请号 |
US19950540387 |
申请日期 |
1995.10.06 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CRONIN, JOHN E.;DEBROSSE, JOHN K.;WONG, HING |
分类号 |
H01L21/768;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824 |
主分类号 |
H01L21/768 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|