摘要 |
PROBLEM TO BE SOLVED: To improve the temperature characteristics of a signal processing circuit for a sensor utilizing the change in capacitance. SOLUTION: Temperature influence can be eliminated by a differential amplification circuit where a capacitor C and a comparison capacitor constituting a sensor are arranged symmetrically. Also, by using an integrated drive signal for the sensor, generally obtainable operational amplifiers 2, 5, and 10 can be used to accurately measure acceleration and pressure. |