SELECTIVE WATER-REPELLING TREATMENT FOR SUBSTRATE, SUBSTRATE PROVIDED WITH LIGHT-SHIELDING MEMBER, AND COLOR FILTER SUBSTRATE FOR IMAGING ELEMENT

摘要

PROBLEM TO BE SOLVED: To obtain a dielectric substrate having excellent color characteristics and good surface smoothness by forming a water-repellent layer comprising a silane- coupling agent on a substrate on which a light-shielding member is partly formed, and then irradiating the substrate surface with oxygen plasma. SOLUTION: A metal thin film is preliminarily formed on a light-transmitting substrate to form a light-shielding part between patterned pixels. A water-repellent film comprising a silane-coupling agent as the source material is formed on the light- transmitting substrate in a vacuum chamber by plasma polymn. method or vapor deposition method. Then oxygen gas is introduced into the vacuum chamber to generate oxygen plasma which is made to irradiate the surface of the light-transmitting substrate having a light-shielding part formed between patterned pixels with the plasma. Thereby, the metal thin film part as a black matrix maintains the water-repellency, while the glass part to be used for the pixel of the color filter is made hydrophilic. Then, the substrate is taken out from the vacuum chamber and an ink for dyeing is applied on the glass part. Since the metal part maintains the water-repellency, the ink can not be spread.