| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of heat dissipation in the middle between the inflow of gas and the exhaust of the gas by a method wherein a hot blow heater, which is provided with a metal protecting tube which heats and discharges the gas sent from a high-pressure gas cylinder, a blower or the like, and a box, which has an aperture of an external shape roughly equal with that of a BGA in its bottom and has an exhaust vent in its upper part or side surfaces, are connected directly with each other. SOLUTION: N2 gas sent from a high-pressure gas cylinder, such as an N2 gas cylinder, goes through a hose 1 and a gas inflow vent 2 and comes into contact to a heater 5, whereby the gas is heated up and the heated-up gas flows in a metallic box 20, heats a BGA 30 and is exhausted through an exhaust vent 22. At this time, the temperature of a thermocouple temperature measuring part 4 is measured by a temperature regulating meter 50 via a thermocouple lead wire 3 and moreover, the output of the heater 5 is controlled and a heater discharge gas temperature can be controlled. By using a metal protecting tube 8, the box 20 and an upper heated air heater 10 can be connected directly with each other. Thereby, the distance between the heater 10 and the box 20, which corresponds to a furnace for heating the BGA 30, is shortest as seen in a distance manner and wastage of heat is eliminated. |
