PLASMA TREATING DEVICE

摘要

PROBLEM TO BE SOLVED: To protect an insulation film in a holder electrode from plasma while preventing the nonuniformity in plasma treatment and generation of dust at the peripheral part of an object to be treated by providing a shade member for covering the peripheral part of the object being installed on the insulation film while keeping insulation space for it. SOLUTION: A ring-shaped electrical insulation member 7 when viewed from the top is arranged at the peripheral part of a holder electrode 2 and an inner-periphery part 72 of the ring-shaped overhang-shaped insulation member 7 is installed on the peripheral upper surface of an insulation film 21 on the electrode 2. A ring-shaped shade member 8 when viewed from the top is arranged at the upper portion of the overhang-shaped insulation member 7 and a shade member 8 can approach or leave a peripheral part s1 of an object S to be treated installed on the electrode 2. A top surface 70 of the overhang- shaped insulation member 7 is a stopper for determining the approach limit to the object S of the shade member 8 for setting an insulation space X between the shade member 8 and the object S.