DISPOSITIF DE PRODUCTION D'UN PLASMA PERMETTANT UNE DISSOCIATION ENTRE LES ZONES DE PROPAGATION ET D'ABSORPTION DES MICRO-ONDES,申请号FR19940013499-传众专利搜索

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发明名称	DISPOSITIF DE PRODUCTION D'UN PLASMA PERMETTANT UNE DISSOCIATION ENTRE LES ZONES DE PROPAGATION ET D'ABSORPTION DES MICRO-ONDES
摘要
申请公布号	FR2726729(B1)	申请公布日期	1997.01.31
申请号	FR19940013499	申请日期	1994.11.04
申请人	METAL PROCESS	发明人	PELLETIER JACQUES
分类号	C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/203;H01L21/205;H01L21/265;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/18	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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