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发明名称
EVALUATING METHOD FOR RELIABILITY OF NON-VOLATILE SEMICONDUCTOR MEMORY AND NON-VOLATILE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0927198(A)
申请公布日期
1997.01.28
申请号
JP19950173668
申请日期
1995.07.10
申请人
MITSUBISHI ELECTRIC CORP
发明人
AJIKA NATSUO
分类号
H01L21/66;G11C29/00;G11C29/56;H01L21/8247;H01L29/788;H01L29/792;(IPC1-7):G11C29/00;H01L21/824
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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