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发明名称
DEVICE FOR SPIN COATING OF SUBSTRATE
摘要
申请公布号
JPH0927444(A)
申请公布日期
1997.01.28
申请号
JP19950173287
申请日期
1995.07.10
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
YABE MANABU
分类号
G03F7/16;B05C11/08;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
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