发明名称 |
Method of and apparatus for measuring film thickness |
摘要 |
<p>A film thickness measuring apparatus measures the thickness of a thin film which is formed on a substrate with an excellent reproducibility regardless of inclination of a surface of a sample. Since an illumination system (20) includes a glass rod (GL) which corrects wavelength dependencies of luminance distributions of light sources (HL, DL), even when an eclipse in reflected light due to inclination of a sample (SP) decreases the energy of the reflected light, a spectral distribution of the reflected light entering a spectroscopic unit (40) is maintained with almost no change. A control unit (50) performs data conversion of multiplying an actual spectral reflectance by a ratio of an average of the actual spectral reflectance which is determined based on an output from the spectroscopic unit (40) to an average of a calibrated spectral reflectance and thereafter calculates a deviation between the two spectral reflectances. As a result, the film thickness is accurately measured while preventing an influence of inclination of the sample (SP). <IMAGE></p> |
申请公布号 |
EP0754931(A2) |
申请公布日期 |
1997.01.22 |
申请号 |
EP19960111447 |
申请日期 |
1996.07.16 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
KOKUBO, MASAHIKO;HORIE, MASAHIRO |
分类号 |
G01B11/06;(IPC1-7):G01B11/06 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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