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发明名称
METHOD AND APPARATUS TO CALIBRATE INTENSITY AND DETERMINE FRINGE ORDER FOR INTERFEROMETRIC MEASUREMENT OF SMALL SPACINGS
摘要
申请公布号
EP0722557(A4)
申请公布日期
1997.01.22
申请号
EP19920922814
申请日期
1992.10.19
申请人
PHASE METRICS
发明人
LACEY, CHRISTOPHER
分类号
G01B9/02;G01B11/14;G11B5/54;G11B21/12;G11B21/21;G11B33/10;(IPC1-7):G01B9/02;G01N21/84
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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