| 摘要 |
PURPOSE: To obtain spectrum where low-energy X rays are emphasized by providing an X-ray optical element for passing X rays with a lower energy at the front side of the X-ray detection element. CONSTITUTION: Primary X rays xα2 formed by an X-ray bulb A are applied to a sample B for exciting fluorescent X rays xα2 and the X rays xα2 are applied to a semiconductor X-ray detection element 2. The X rays xα2 are introduced into a conduit 7 and reach an inner-periphery surface 7a. The conduit 7 totally reflects low-energy X rays but does not totally reflect high. energy X rays to separate the two X rays. For example, the low-energy X rays xa and xb are reed on the inner-periphery surface 7a and are emitted from the exit side opening of the conduit 7 but the high-energy X rays xd are not reflected on the inner-periphery surface 7a and are not emitted from the exit side opening. Therefore, the lower energy side of the intensity distribution of X rays emitted from the exit side opening of the conduit 7 is emphasized, thus setting spectrum while the low-energy X rays are emphasized in the element 2.
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