| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a fuse structure for an integrated circuit which is blown off upwardly. SOLUTION: This method of making and blowing off top lead fuses 41, 42 contains a step a of forming a conductive top lead fuse 41 on a layer of an insulator 45; a step b of depositing a layer of an upper insulator 47 so that a ratio of a thickness of an upper opposite side part is about 2:1 so as to cover a top lead fuse; and a step c of etching back the upper insulator so that a ratio of a thickness of the upper opposite side part is about 1:2 by entire anisotropic etching. The top lead fuses 41, 42 obtained as the result can selectively be blown off 50 explosively from an upper face of the upper insulator.</p> |
