发明名称 Photochemically modified diamond surfaces, and method of making the same
摘要 Diamond and diamond-like materials having photochemically modified surfaces, and a process for photochemically modifying the surface of diamond and diamond-like materials. Preferably, the substrate to be modified is a single crystal, polycrystalline film or powder of diamond or any silicon carbide polytype. Photochemical modification of the surface enables the addition or exchange of specific surface functional groups. These surface modifiers change the chemical, adhesive and electronic properties of the diamond and diamond-like substrate materials. The modified subtrates are useful for producing semiconductor devices for use at high temperatures, high powers, and in otherwise harsh environments.
申请公布号 US5593783(A) 申请公布日期 1997.01.14
申请号 US19940261807 申请日期 1994.06.17
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 MILLER, JOHN B.
分类号 C04B41/46;C04B41/82;C23C8/00;C30B33/00;(IPC1-7):B23B9/00 主分类号 C04B41/46
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