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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH097950(A)
申请公布日期
1997.01.10
申请号
JP19950180956
申请日期
1995.06.23
申请人
SONY CORP
发明人
KENMOTSU HIDENORI
分类号
C23C14/06;H01L21/203;H01L21/28;H01L21/285;(IPC1-7):H01L21/203
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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