发明名称 Metal paste, process for producing same and method of making a metallic thin film using the metal paste
摘要 A metal paste comprising ultrafine particles of a metal. The particles have a particle size of 1000 angstroms (0.1 micron) or less and are individually uniformly dispersed in an organic solvent. A process for producing a metal paste comprises the steps of evaporating a metal in a vacuum chamber in an atmosphere of an inert gas at a pressure of 10 Torr or less and of collecting the vapor of the evaporated metal on a cooling surface in the form of ultrafine particles having a particle size of 1000 angstroms (0.1 micron) or less, wherein a vapor of an organic solvent is introduced into the vacuum chamber while the metal is being evaporated. A method for preparing a metallic thin film having a thickness of between 0.01 micron and 1 micron. A metal paste containing ultrafine metal particles having a diameter of 0.1 micron or less uniformly dispersed in an organic solvent is coated on a substrate, dried and sintered.
申请公布号 US5587111(A) 申请公布日期 1996.12.24
申请号 US19910677190 申请日期 1991.03.29
申请人 VACUUM METALLURGICAL CO., LTD. 发明人 WATANABE, KAZUHIRO;OSHIMA, MICHIHIRO;SETOGUCHI, KAZUHIRO;ODA, MASAAKI
分类号 B22F1/00;B22F3/22;B22F5/00;B22F7/02;B22F9/12;H01B1/02;H01G4/008;H01L21/48;H01L23/498;H05K1/09;(IPC1-7):H01B1/02 主分类号 B22F1/00
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