发明名称 |
Metal paste, process for producing same and method of making a metallic thin film using the metal paste |
摘要 |
A metal paste comprising ultrafine particles of a metal. The particles have a particle size of 1000 angstroms (0.1 micron) or less and are individually uniformly dispersed in an organic solvent. A process for producing a metal paste comprises the steps of evaporating a metal in a vacuum chamber in an atmosphere of an inert gas at a pressure of 10 Torr or less and of collecting the vapor of the evaporated metal on a cooling surface in the form of ultrafine particles having a particle size of 1000 angstroms (0.1 micron) or less, wherein a vapor of an organic solvent is introduced into the vacuum chamber while the metal is being evaporated. A method for preparing a metallic thin film having a thickness of between 0.01 micron and 1 micron. A metal paste containing ultrafine metal particles having a diameter of 0.1 micron or less uniformly dispersed in an organic solvent is coated on a substrate, dried and sintered.
|
申请公布号 |
US5587111(A) |
申请公布日期 |
1996.12.24 |
申请号 |
US19910677190 |
申请日期 |
1991.03.29 |
申请人 |
VACUUM METALLURGICAL CO., LTD. |
发明人 |
WATANABE, KAZUHIRO;OSHIMA, MICHIHIRO;SETOGUCHI, KAZUHIRO;ODA, MASAAKI |
分类号 |
B22F1/00;B22F3/22;B22F5/00;B22F7/02;B22F9/12;H01B1/02;H01G4/008;H01L21/48;H01L23/498;H05K1/09;(IPC1-7):H01B1/02 |
主分类号 |
B22F1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|