Elektrisch programmierbares Antischmelzsicherungselement und Verfahren zu seiner Herstellung
摘要
An electrically programmable antifuse element incorporates a composite interlayer of dielectric material and amorphous silicon interposed between two electrodes. The lower electrode may be formed from a refractory metal such as tungsten. Preferably, a thin layer of titanium is deposited over the tungsten layer and its surface is then oxidized to form a thin layer of titanium oxide which serves as the dielectric material of the composite dielectric/amorphous silicon interlayer. A layer of amorphous silicon is then deposited on top of the titanium oxide dielectric to complete the formation of the composite interlayer. A topmost layer of a refractory metal such as tungsten is then applied over the amorphous silicon to form the topmost electrode of the antifuse. <IMAGE>
申请公布号
DE69123074(D1)
申请公布日期
1996.12.19
申请号
DE1991623074
申请日期
1991.04.09
申请人
ACTEL CORP., SUNNYVALE, CALIF., US
发明人
MCCOLLUM, JOHN L., SARATOGA, CALIFORNIA 95070, US;CHEN, SHIH-OU, FREMONT, CALIFORNIA 94539, US