发明名称 |
Method to produce pn CdTe/CdS thin film solar cells |
摘要 |
<p>Method for producing pn-CdTe/CdS thin-film solar cells in which, on a transparent substrate in the form of inexpensive soda lime glass, a transparent TCO layer is deposited as a front contact, which layer is preferably provided with an ultra-thin indium layer which in turn is coated with the CdS layer, the substrate thus coated, up to the CdTe coating, being raised to a temperature between 480 DEG C and 520 DEG C, which is maintained during the subsequent rapid CdTe deposition according to the short-distance process using a preferred deposition rate from 5 to 15 mu m/min in an inert-gas atmosphere. The indium layer is dissolved during this deposition and produces the required n-doping of the CdS layer without an additional process step. In this manner it is possible to produce solar cells having a high efficiency in a cost- effective process suitable for mass production. …<IMAGE>… </p> |
申请公布号 |
EP0535522(B1) |
申请公布日期 |
1996.12.18 |
申请号 |
EP19920116254 |
申请日期 |
1992.09.23 |
申请人 |
ANTEC ANGEWANDTE NEUE TECHNOLOGIEN GMBH |
发明人 |
BONNET, DIETER, DR.;HENRICHS, BEATE;JAEGER, KARLHEINZ;RICHTER, HILMAR, DR. |
分类号 |
H01L31/04;H01L31/073;H01L31/18;(IPC1-7):H01L31/18;H01L31/022;H01L31/072 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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