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发明名称
摘要
申请公布号
JP2564595(B2)
申请公布日期
1996.12.18
申请号
JP19880057520
申请日期
1988.03.11
申请人
HITACHI LTD
发明人
SUZUKI HIROMICHI;SATO HAJIME;KITAMURA WAHEI;MASUDA MASACHIKA
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
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