| 摘要 |
PURPOSE: To obtain an inspection apparatus whose operating efficiency is enhanced in a continuous operation by excuting the electric inspection of an object to be inspected, which has been conveyed alternately by a first conveyance part and a second conveyance part continuously by alternately changing over a first contact part and a second contact part at a testing head. CONSTITUTION: Testing heads 21, 22 are provided with first sockets 21A, 22A and second sockets 21B, 22B which can be changed overland a first conveyance mechanism 23 and a second conveyance mechanism 24 which correspond to the heads 21, 22. In addition, the mechanisms 23, 24 are provided with first conveyance parts 233, 243 and second conveyance parts 234, 244 which convey a device between the sockets 21A, 22A and 21B, 22B and an alignment part 15 for feed and an alignment part 16 for feed. The respective conveyance parts 233, 243 or 234, 244 simultaneously convey the device to the sockets 21A, 22A and the sockets 21B, 22B. The respective sockets 21A, 22A and the sockets 21B, 22B are changed over by the heads 21, 22, and the electric inspection of the device is performed continuously. As the result, a tester can be operated continuously without keeping it idle. |
