| 摘要 |
PURPOSE: To increase the resolution and to improve condensing characteristics and image transfer function without decreasing qualities in an image and information by partially forming a light-shielding film in the center part of a lens plane including the optical axes of plural microlenses on a transparent substrate. CONSTITUTION: A photosensitive resin 2 is applied on a transparent substrate 3, exposed to light through a photomask 1, and developed to form plural photosensitive resin patterns 4. These patterns 4 are fused or softened by heating to form convex resin microlenses 5. Then the three-dimensional shape of these convex resin microlenses 5 is transferred to the transparent substrate by dry etching to form a microlens array 6. Then a light-shielding film 24 is formed in the center part of the lens plane including the optical axes on the back surface of the microlens array 23 so that the film 24 partially covers the lens plane. The peripheral shape of the light-shielding film 24 is preferably almost same as that of the aperture of the microlens (the cross section perpendicular to the optical axis of the lens), and the ratio of diameters of the microlens to the light-shielding part is preferably 0.05-0.90. |
