| 摘要 |
<p>PURPOSE: To provide a substrate member positioning and holding device capable of positioning and holding a substrate member by smoothly moving the substrate member to the reference position on an observation stage. CONSTITUTION: While a holding stage 19 on which a glass substrate 20 is placed and fixed by means of suction pads 21a to 21f is moved toward reference pins 18a to 18c on the X stage 16 by energization of pressing cylinders 27, 28, the side edges of the glass substrate 10 are directly pressed to these reference pins 18a to 18c, by which the glass substrate is positioned. The fixing cylinder of a holding stage fixing section is energized from this positioning state, by which the holding stage 19 is fixed to the X stage 16.</p> |
