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发明名称
Maskenausrichtung für Abstandslithographie unter Verwendung eines gespeicherten Videobildes.
摘要
申请公布号
DE556669(T1)
申请公布日期
1996.11.28
申请号
DE19930101829T
申请日期
1993.02.05
申请人
KARL SUESS KG PRAEZISIONSGERAETE FUER WISSENSCHAFT UND INDUSTRIE - GMBH & CO, 85748 GARCHING, DE
发明人
DOMENICALI, PETER L., MONTPELIER, VERMONT 05602, US
分类号
G03F1/08;G03F9/00;H01L21/027;H01L21/30;H01L21/68;H04N7/18;(IPC1-7):G03F9/00;G02B21/00
主分类号
G03F1/08
代理机构
代理人
主权项
地址
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