REFLECTIVE SPACE OPTICAL MODULATION ELEMENT ARRANGEMENT

摘要

PROBLEM TO BE SOLVED: To obtain shielding of the light to a semiconductor element, high optical throughput and contrast by forming an overlap area to reduce the surrounding light transmitted to a semiconductor base board in a patternized reflector-absorber layer. SOLUTION: This array is composed of plural liquid crystal elements arranged on individual mirrors on an insulator layer on a semiconductor base board 14, plural electric circuits which are formed in a semiconductor and are respectively joined to the liquid crystal elements and modulate the light passing through there and a patternized reflector-absorber layer 34 arranged in relation to the mirrors. The reflector-absorber layer 34 optically shields the plural electric circuits from the surrounding light and the infiltrating light, and the reflector-absorber layer has the edge overlapping on the edges of the mirrors therefor, and forms an overlap area to attenuate transmission of the surrounding light and the infiltrating light to the semiconductor base board 14 smaller than about 1/100000.