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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08306777(A)
申请公布日期
1996.11.22
申请号
JP19950108550
申请日期
1995.05.02
申请人
MATSUSHITA ELECTRON CORP
发明人
BITO YOJI;OGURA TAKEISA
分类号
H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/768;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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