Wafer transport device,申请号AU19940067851-传众专利搜索

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发明名称	Wafer transport device
摘要
申请公布号	AU673748(B2)	申请公布日期	1996.11.21
申请号	AU19940067851	申请日期	1994.05.06
申请人	KENNETH C. MILLER	发明人	KENNETH C. MILLER
分类号	B65G49/07;H01L21/677;(IPC1-7):B65G49/07;B65G47/74;B65G35/00;H01L21/68	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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