发明名称 SHEET FOR TRANSCRIPTION AND PRODUCTION OF SEMICONDUCTOR DEVICE BY USING THE SAME
摘要 PURPOSE: To prepare a sheet for transcription capable of inexpensively and efficiently forming a polyimide film on the rear face of a semiconductor element without pollution of the surface of the semiconductor element by attaching a film made from at least one of polyimides (precursors) on a base material sheet in scattered spots-like state. CONSTITUTION: (A) A base material sheet (preferably silicone-coated one selected from the group of a polyester film separator, a polyimide film separator and a polyolefin film separator, etc.) is attached with a film formed by at least one of a polyimide of preferably formula I R1 is a group of formula II, etc.; R2 is CH2 CH2 CH2 or CH2 CH2 CH2 CH2 , etc.; (n) is an integer of 1-100; (a) and (b) satisfy (a+b=1) and 0.5<=(a/(a+b))<=0.99} and preferably a polyimide precursor as a polyamic acid of formula III, etc., in a scattered spots-like state to obtain the objective sheet for transcription.
申请公布号 JPH08302299(A) 申请公布日期 1996.11.19
申请号 JP19950113374 申请日期 1995.05.11
申请人 NITTO DENKO CORP 发明人 IGARASHI KAZUMASA;IKO KAZUO
分类号 C09J7/02;C09J179/08;H01L21/56;H01L23/29;H01L23/31 主分类号 C09J7/02
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