| 发明名称 |
FOOT ELEMINATING METHOD OF BARRIER METAL |
| 摘要 |
The method is designed to remove a remained foot not by over-etch but by appending CF4 gas in the process of removing a photoresist film(4) after dry etching of an Al film(3) and a TiN film (2) or an Al film(3) and a Ti film(2) using a photoresist film(4) mask pattern when the Al film(3) is formed on a barrier metal(2) of the TiN film or the Ti film in order to form a good metal wiring.
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| 申请公布号 |
KR960015485(B1) |
申请公布日期 |
1996.11.14 |
| 申请号 |
KR19930012954 |
申请日期 |
1993.07.09 |
| 申请人 |
HYUNDAI ELECTRONICS IND.CO.,LTD. |
发明人 |
PARK, JAE-SOO;CHON, JONG-PO;KANG, YOUNG-SOO |
| 分类号 |
H01L21/28;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/28 |
| 代理机构 |
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