| 摘要 |
PROBLEM TO BE SOLVED: To enable application to a microactuator whose one end is fixed, by constituting a retaining plate of alloy wherein noble metal is base, or of noble metal, or bringing a layer of electro-mechanical conversion material which is covered with noble metal, directly with the retaining plate. SOLUTION: A retaining plate 1 which is formed of noble metal or covered with noble metal is prepared. A layer 2 of electro-mechanical conversion material is formed on the retaining plate 1. By baking the whole, electro-mechanical conversion property is imparted to the electro-mechanical conversion material layer 21, and a conducting layer 3 is formed on the electro-mechanical conversion material layer. Thereby application to a microactuator wherein at least one end is fixed is enabled. Application to a micromotor wherein an upper conducting layer is made fan-shaped for the stator of a motor is also enabled. |
