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发明名称
摘要
申请公布号
JP2551380(B2)
申请公布日期
1996.11.06
申请号
JP19940116398
申请日期
1994.05.30
申请人
NIPPON ELECTRIC CO
发明人
ISHIKAWA MASAOKI
分类号
H01L29/812;H01L21/338;H01L29/778;(IPC1-7):H01L21/338
主分类号
H01L29/812
代理机构
代理人
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