ARTICLE HANDLING MEMBER, ITS MANUFACTURING METHOD, HOUSING CONTAINER, AND ARTICLE HANDLING DEVICE

摘要

PURPOSE: To provide an article handling technology for retaining an article in a clean and pure state and at the same time for preventing electrostatic breakdown of the retained sheet-shaped article. CONSTITUTION: In a conductive vacuum uptake spin head 21 which is placed to a motor shaft 24 being grounded via a grounding terminal 25 and is rotated by allowing a semiconductor wafer 20 to be sucked and fixed on a wafer uptake surface 28 where a wafer uptake groove 28a which is sucked via a vacuum exhaust port 29 is engraved, the reverse side of a base material 22 is improved by a desired method and then a conductive resin coating is formed. Then, a conductive resin coating 23 is constituted of a conductive resin material which does not contain a metal constituent, the surface resistance of the conductive resin coating 23 is controlled to, for example, 10<6> (Ω/sq.)-10<11> (Ω/sq.), and static electricity electrified to a semiconductor wafer 20 being placed on the wafer uptake surface 28 is gradually discharged via the conductive resin coating 23 and the grounding terminal 25.