ENTWURF VON PIEZORESISTIVEM DRUCKSENSOR AUS SILIZIUM
摘要
A form of pressure sensor diaphragm and method of making that allows for the formation of long rectangular plate structures in semiconducting material, especially Silicon. A plurality or multiplicity of sensors may be constructed on a single chip, thus providing for absolute and relative sensing of pressure on a single device.
申请公布号
DE69210041(T2)
申请公布日期
1996.10.31
申请号
DE1992610041T
申请日期
1992.12.11
申请人
HONEYWELL INC., MINNEAPOLIS, MINN., US
发明人
BURNS, DAVID, W., MINNEAPOLIS, MN 55419, US;GLEN, MAX, C., MINNEAPOLIS, MN 55331, US