PIN USED FOR HOT PLATE TYPE PROXIMITY BAKE FURNACE AND FURNACE USING IT

摘要

PURPOSE: To prevent an occurrence of flaw on a substrate of a hot-plate type proximity bake oven caused by a pin which supports the substrate by using the pin made of synthetic resin. CONSTITUTION: In a hot-plate type proximity bake oven 1, a plurality of proximity pins 6 protrude upwardly from a soaking plate of a hot plate 4, have heads which support a substrate 5 and assure a distance which enables a proximity bake between the substrate 5 supported on the heads and the soaking plate 3. The proximity pins 6 are made of synthetic resin.