| 摘要 |
PURPOSE: To detect the positional data on alignment marks with high precision by detecting the positional data on the elements using the first measurement value given by the light flux through the intermediary of a mark A and the second measurement value given by the light flux through the intermediary of another mark B formed between a mark and adjacent marks. CONSTITUTION: Marks in width W and recessed sectional shape are arranged at a pitch of P. Out of these marks, six marks 01, I1, I2, I3, I4, 02 in receesed sectional shape are treated as the alignment marks A. Besides, five marks (Marks B) J1-J5 in width P-W and sectional shape in a convex type inverse to the marks A formed between adjacent marks A are treated as the alignment marks B. Accordingly, one alignment mark AA is treated as two alignment marks i.e., the alignment mark A in a recessed sectional shape and the alignment mark B in a convex sectional shape inverse to that of the alignment mark A. |
