FORMATION OF ANTIOXIDANT MASK AND ELEMENT ISOLATION FILM,申请号JP19950074974-传众专利搜索

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发明名称	FORMATION OF ANTIOXIDANT MASK AND ELEMENT ISOLATION FILM
摘要
申请公布号	JPH08274085(A)	申请公布日期	1996.10.18
申请号	JP19950074974	申请日期	1995.03.31
申请人	SONY CORP	发明人	MATOBA YOSHIHISA
分类号	H01L21/316;H01L21/318;(IPC1-7):H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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