| 摘要 |
PURPOSE: To realize highly accurate measurement while enhancing the workability by holding a sample partially, at the upper central part, on a sample holder through an adhesive member and suspending the sample vertically. CONSTITUTION: A sample, i.e., a wafer, is held partially, at the upper central part, on a sample holder and suspended vertically from there. The sample is held by placing an adhesive member, e.g. an adhesive double coated tape, between a part in the vicinity of upper central part of the sample and the sample holder or through vacuum chuck at a part in the vicinity of upper central part of the sample. A planar sample is employed where a relationship of a<4> /Et<3> >2×10<-8> (m<2> s<2> /kg) is satisfied among the thickness (t), the Young's modulus E and a value (a) corresponding to the radius of the sample. With such arrangement, the angle ω of a measuring plane extending in parallel with the incident direction of X-rays and the angle ϕ of a measuring plane extending normally to that can be reproduced while suppressing the fluctuation. |
