| 摘要 |
PURPOSE: To provide a tactile sensor probe capable of detecting the vibrating characteristic of a piezoelectric oscillator and holding this piezoelectric oscillator without lowering the resonance sharpness, and also detecting a viscoelasticity characteristic. CONSTITUTION: In this probe, an energy sealed piezoelectric oscillator 10 is used as the piezoelectric oscillator, and this probe is held by a holding part 30, avoiding the electrode part of the energy sealed piezoelectric oscillator 10, whereby the vibration of the energy sealed piezoelectric oscillator 10 has no influence. The equivalent circuit constant of the energy sealed piezoelectric oscillator 10 is used in an oscillating circuit 20, whereby the oscillating circuit 20 can be assembled into a small size with a simple structure, and set near the energy sealed piezoelectric oscillator 10. Thus, the oscillating circuit 20 can be built in a housing part 40, and the holding part 30 can be provided on the housing part 40. |
