ANGULAR VELOCITY SENSOR

摘要

An angular velocity sensor used for posture control of a moving body or for a navigation system, which is directed to accomplish higher sensitivity, lower offset, lower offset drift, low sensitivity to translational acceleration, and higher impact resistance by a smaller size and a lower cost. The sensor is made of a ceramic piezoelectric material or a quartz material and has four parallel vibration arms (12 to 15 or 112 to 115), support portions (11, 111) for commonly supporting one or both ends of these vibration arms, wherein the joint position with support portions (11 and 111), of the two inside vibration arms and that of the two outside vibration arms may be coincident or different, and the two outside vibration arms (12 and 15 or 112 and 115) of a comb-shaped composite tuning-fork (10 or 110) are used as the driving side tuning fork, while two inside vibration arms (13, 14 or 113, 114) are used as the detection side tuning-fork in such a manner as to correspond to driving and detection, respectively.