Verfahren zur Herstellung magnetischer Aufzeichnungsträger

摘要

A magnetic recording medium having a substrate (8, 21), and an artificial superlattice (10, 14) deposited on the substrate (8, 21) as a vertical magnetization film. The artificial superlattice (10, 14) is a Co/Pt artificial superlattice which is composed of alternate Co and Pt layers deposited on the substrate. The magnetic recording medium is fabricated by the steps of: disposing a Co target (24) and a Pt or Pd target (25) separating from a substrate (8, 21); performing an RF sputtering to the substrate (8, 21) by alternately facing the substrate with the Co target (24) and the Pt or Pd target (25) by means of periodical movement of the substrate, thereby forming a Co/Pt or Co/Pd artificial superlattice (10, 14)) on the substrate; and performing heat treatment to the Co/Pt or Co/Pd artificial superlattice (10, 14) at a temperature T in the range of 200 DEG C to 450 DEG C inclusive.