| 摘要 |
PURPOSE: To obtain a process for producing a uniform-thickness composite film of a solid polyelectrolyte without using a polymn. initiator or the third component by forming a mixture of a specific silicon compd. and a lithium- supported electrolyte on the surface of a conductive material and subjecting the mixture to plasma polymn. CONSTITUTION: A conductive material (e.g. an org. conductive polymer, manganese dioxide, or titanium disulfide) is immersed in a low-molecular mixture of a liq. organosilicon compd. having ethylene oxide (-CH2 CH2 O-) groups in the molecule and a lithium-supported electrolyte to form a layer of the mixture on the surface of the material. The resulting composite film of the conductive material and the mixture is exposed to glow discharge plasma in a vacuum to polymerize the mixture. A substrate holder 2 and discharge electrodes 3 are installed in a vacuum vessel 1; the electrodes 3 are connected to a discharge power source 4; the vessel 1 is connected to an exhaust system 5 such as a pump; the composite film 7 of the conductive material and the mixture is set on the holder 2; and Ar, etc., is introduced from an inert gas supply source 8 into the vessel 1 and the inside of the vessel is kept at 1-2Torr to conduct glow discharge. |
