| 摘要 |
PURPOSE: To obtain a highly accurate finishing surface having no mechanical scratch fixing a glass optical element inside of a housing vessel at polishing work time of the glass optical element, and injecting and sealing an alkaline solution and an abrasive grain inside the housing vessel, and rotating and/or vibrating the housing vessel. CONSTITUTION: When cylindrical lenses 7 are polished, first of all, by installing parts 1d and 1e, the two cylindrical lenses 7 are installed on an inside surface of a vessel main body 1a whose external shape is a rectangular parallelepiped and inside is formed in a hollow shape. Next, after an abrasive grain and an alkaline solution 10 are sealed in a closed vessel 1, this vessel 1 is installed in a holding part 2, and a rotational driving part 3 is driven, and while rotating the vessel 1 in the θ direction, the rotational driving part 3 is moved in the X-Y direction by an XY stage 5. When this operation is continued, on the inside of the closed vessel 1, a surface layer of the lenses 7 is softened by the alkaline solution 10 and an oxidizing type abrasive grain 9, and a diamond abrasive grain 8 and the oxidizing abrasive grain 9 collide with there, and polishing is performed. |
