SEMICONDUCTOR DEVICE AND ITS MANUFACTURE,申请号JP19950040173-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号	JPH08236472(A)	申请公布日期	1996.09.13
申请号	JP19950040173	申请日期	1995.02.28
申请人	NEC CORP	发明人	SUZUKI HISAMITSU
分类号	C23C18/00;H01L21/28;H01L21/768;(IPC1-7):H01L21/28	主分类号	C23C18/00
代理机构		代理人
主权项
地址

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