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发明名称
ISOLATION METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08236609(A)
申请公布日期
1996.09.13
申请号
JP19950040308
申请日期
1995.02.28
申请人
NKK CORP
发明人
TAKEUCHI NOBUYOSHI
分类号
H01L21/31;H01L21/302;H01L21/3065;H01L21/316;H01L21/318;H01L21/76;(IPC1-7):H01L21/76;H01L21/306
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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